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This Document contains the requirements and test method that can be used to evaluate whether an MFC will maintain its functional characteristics when subjected to electromagnetic interference (EMI) levels typical of the industry
SEMI E113-1101 (first published)
SEMI E113-0306 (Reapproved 0512)
Test methods for the optical properties of 3D luminance
E00600 - SEMI E6 - Guide for Semiconductor Equipment Installation Documentation Revision:SEMI E6-96 - Superseded This Document contains the requirementsNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 Within the semiconductor industry, the diversity and complexity of equipment creates difficult challenges for facilities design and equipment installation. This Guide should benefit equipment suppliers and